By Assi Hansen, Isamu Miyamoto, Tiina Amberla, Yasuhiro Okamoto One of the most employed material combinations in microtechnology is the glass-silicon pair. Since the huge growth of the microelectromechanical devices, sensors and micro-fluidic devices, bonding of this couple has become more and more critical issue. Many of these glass-silicon bonding processes, for example anodic bonding, […]
Tag: Laser Joining
Laser Applications in the Automotive Industry
By: Klaus Loeffler TRUMPF Laser und Systemtechnik GmbH, Ditzingen, Germany The automotive industry has been a target market for the laser soon after the invention of the laser in 1960. Mass production and flexibility have been the arguments for the laser. The first installations in 1973 all the way to late 1980 have been successful due […]
Laser Joining for Packaging in MEMS Applications and Micro-Devices
By: Norbert Lorenz In recent years the interest in micro-devices, including Micro-Electro-Mechanical-Systems (MEMS), from research institutions, industry and the press has risen considerably. However one of the persisting challenges in the fabrication of such devices is the packaging process. A number of different bonding techniques have been developed but in general they require the entire […]